Umgaqo wokusebenza kunye nokwakheka kwe-capacitive pressure sensor

I-capacitive pressure sensor yenziwe ngeziqwenga ezibini ezihambayo (i-elastic metal diaphragm), iziqwenga ezibini ezizinzileyo (i-metal coating kwiglasi egobileyo kwi-elastic diaphragm ephezulu nesezantsi), ii-output terminals kunye ne-housing, njl. Ii-capacitor ezimbini zochungechunge zenziwa phakathi kwepleyiti ehambayo kunye neepleyiti ezimbini ezizinzileyo. Xa uxinzelelo lokungenisa lusebenza kwi-elastic diaphragm, i-elastic diaphragm ivelisa i-displacement, ebopheleleke ekunciphiseni umgama ngenxalenye enye ezinzileyo, kwaye yonyuse umgama ngenxalenye enye ezinzileyo (inokuboniswa ngesiqwenga sephepha). Umgama phakathi kwee-electrode ezimbini zesinyithi yenye yezinto ezibalulekileyo ezichaphazela i-capacitance, umgama uyanda, i-capacitance iyancipha, umgama uyancipha, i-capacitance iyanda. Olu hlobo lwesakhiwo lubizwa ngokuba yi-differential structure apho iiparameter zezinto ezimbini zokuva zitshintshwa ngenani elifanayo kodwa ngokuchaseneyo ngenxa yobungakanani obulinganisiweyo.

Ukuba i-diaphragm elastiki ibekwe phakathi koxinzelelo olusecaleni kunye noxinzelelo lomoya (umngxuma ophezulu we-diaphragm elastiki ungumoya), uxinzelelo olulinganisiweyo yitafile; Ukuba i-diaphragm elastiki ibekwe phakathi koxinzelelo olusecaleni kunye ne-vacuum (umngxuma ophezulu we-diaphragm elastiki udlula kwi-vacuum), uxinzelelo olupheleleyo luyalinganiswa. Umthamo we-capacitor ulingana ne-dielectric kunye nendawo yayo esebenzayo phakathi kweepleyiti ezimbini ze-capacitor, kwaye ulingana ngokuphambeneyo nomgama ophakathi kweepleyiti ezimbini, oko kukuthi, i-C=ε A/ D, apho i-ε iyinto ehlala i-dielectric ye-dielectric, i-A yindawo esebenzayo phakathi kwee-electrode ezimbini zesinyithi, i-D ngumgama ophakathi kwee-electrode ezimbini zesinyithi. Kolu lwalamano, kunokubonwa ukuba xa ezimbini zeeparameter zingatshintshi kwaye enye iparameter isetyenziswa njenge-variable, i-capacitance iya kutshintsha kunye ne-parameter etshintshayo.
Kukho iintlobo ezininzi zeesekethe zokulinganisa ezisetyenziswa ne-capacitive pressure sensor. Masithathe i-bridge circuit njengomzekelo ukubonisa umgaqo wokusebenza kwe-capacitance differential sensor measuring circuit. Ngenxa yokuba i-capacitance yi-AC parameter, i-bridge iyavuselelwa yi-AC nge-transformer. I-Transformer yi-coil ezimbini kunye ne-capacitance ye-bridge, xa kungekho xinzelelo lokungena, i-bridge ibhalansi, kunye namaxabiso amabini e-capacitance alingana ne-C0, xa i-pressure effect, enye yexabiso le-capacitance le-C0 + delta C, enye ixabiso le-capacitance le-C0 – delta, C (i-delta C yoxinzelelo lwangaphandle olubangelwa kukwahluka kwe-capacitance), yi-bridge engaphandle kwe-balance, Apho ixabiso le-capacitance liphezulu, i-voltage nayo iphezulu, kwaye umahluko we-voltage wenziwa phakathi kwee-capacitors ezimbini, apho i-bridge ivelisa i-voltage output U emele uxinzelelo lokungenisa.