I-sensor yoxinzelelo lwe-capacitive yenziwe ngamacandelo amabini ahambayo (i-elastic metal diaphragm), iziqwenga ezimbini ezisisigxina (intsimbi yentsimbi kwiglasi ye-concave kwi-diaphragm ephezulu kunye nesezantsi), ii-terminals zemveliso kunye nezindlu, njl. ipleyiti kunye namacwecwe amabini angatshintshiyo.Xa uxinzelelo lokungeniswa lusebenza kwi-diaphragm elastic, i-diaphragm elastic ivelisa ukufuduka, okubopheleleka ukunciphisa umgama kunye neqhekeza elilodwa, kunye nokwandisa umgama kunye nesinye isiqwenga esisisigxina (inokubonakaliswa kwiphepha lephepha).Umgama phakathi kwee-electrode ezimbini zetsimbi yenye yezinto ezibalulekileyo ezichaphazela amandla, umgama uyanyuka, i-capacitance iyancipha, umgama uyancipha, ukwanda kwe-capacitance.Olu hlobo lolwakhiwo lubizwa ngokuba lulwakhiwo olwahlukileyo apho iiparamitha zeziqalelo ezimbini zezivamvo zitshintshwa ngesixa esifanayo kodwa ngokuchaseneyo ngenxa yobungakanani obulinganisiweyo.
Ukuba i-diaphragm e-elastic ibekwe phakathi koxinzelelo lwecala kunye noxinzelelo lwe-atmospheric (i-cavity ephezulu ye-diaphragm elastic is atmospheric), uxinzelelo olulinganisiweyo luyitafile;Ukuba i-diaphragm e-elastic ibekwe phakathi koxinzelelo lwecala kunye ne-vacuum (i-cavity ephezulu ye-diaphragm e-elastic idlula kwi-vacuum), uxinzelelo olupheleleyo lulinganiswa.Umthamo we-capacitor ulingana ne-dielectric kunye nommandla wayo osebenzayo phakathi kwamacwecwe amabini e-capacitor, kwaye ngokuphambene ngokuhambelana nomgama phakathi kwamacwecwe amabini, oko kukuthi, C = ε A/ D, apho u-ε yi-dielectric engaguqukiyo. ye-dielectric, i-A yindawo esebenzayo phakathi kwee-electrode ezimbini zetsimbi, i-D ngumgama phakathi kwee-electrode ezimbini zetsimbi.Ukususela kolu nxulumano, kunokubonwa ukuba xa iiparitha ezimbini zingatshintshi kwaye enye iparameter isetyenziswe njengento eguquguqukayo, i-capacitance iya kutshintsha ngokutshintsha ipharamitha.
Kukho iintlobo ezininzi zeesekethe zokulinganisa ezisetyenziswa kunye ne-capacitive pressure sensor.Masithathe isekethe yebhulorho njengomzekelo ukubonisa umgaqo wokusebenza we-capacitance differential sensor measuring circuit.Ngenxa yokuba i-capacitance i-parameter ye-AC, ibhuloho ivuyiswa yi-AC ngokusebenzisa i-transformer.I-Transformer i-coil ezimbini kunye ne-capacitance yebhuloho, xa kungekho xinzelelo lokungena, ibhuloho ekulinganisweni, kunye namaxabiso amabini e-capacitance alingana ne-C0, xa impembelelo yoxinzelelo, enye yexabiso le-C0 + delta C, elinye ixabiso le-capacitance ye-C0 - i-delta. , C (i-delta C yoxinzelelo lwangaphandle olubangelwa kukuguquguquka kwe-capacitance), yibhulorho ephuma kwi-balance, apho ixabiso le-capacitance liphezulu, i-voltage nayo iphezulu, kwaye umahluko wombane wenziwa phakathi kwee-capacitors ezimbini, apho i-capacitance value iphezulu. ibhulorho ivelisa i-voltage output U emele uxinzelelo lokuthatha.
Ixesha lokuposa: Sep-02-2022